… by laser or other light or photon beam, ultrasonic, electro-discharge, electro-chemical, electron beam, ionic-beam or plasma arc processes; water-jet …
Explanatory notes
… by laser or other light or photon beam, ultrasonic, electro‑discharge, electro‑chemical, electron beam, ionic‑beam or plasma arc processes; water-jet … of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays. …