… of material, by laser or other light or photon beam, ultrasonic, electro-discharge, electro-chemical, electron …
Explanatory notes
… of material, by laser or other light or photon beam, ultrasonic, electro‑discharge, electro‑chemical, electron beam, … working any material by removal of material, of a kind used solely or principally for the manufacture of semiconductor … typically at a velocity of 2 to 3 times the speed of sound. They operate under pressures of 3,000 to 4,000 bars …