… of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel …
Explanatory notes
… of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel … which are obtained by vaporizing a solid. For example : (1) Evaporation equipment , in which the film is generated by … the photoresist spinners which apply liquid photoresist evenly over the surface of the wafer. (b) Equipment for …