Harmonized System
Section XVIII > Chapter 90 > Heading 9031 > 9031.4 > 9031.41
For inspecting semiconductor wafers or devices (including integrated circuits) or for inspecting photomasks or reticles used in manufacturing semiconductor devices (including integrated circuits)
Section XVIII > Chapter 90 > Heading 9031 > 9031.80
Other instruments, appliances and machines
Section XVIII > Chapter 90 > Heading 9031 > 9031.90
Parts and accessories
Section XVIII > Chapter 90 > Heading 9032
Automatic regulating or controlling instruments and apparatus.
Section XVIII > Chapter 90 > Heading 9032 > 9032.8
Other instruments and apparatus
Section XVIII > Chapter 90 > Heading 9032 > 9032.8 > 9032.81
Hydraulic or pneumatic